Clean & Green Hi Technology

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Developer Management System (Nagase OEM)

DPF (Developer Purification & Filtration System)

Introduction

  • System recycles waste developer that contains photo resists using Nano-Filter to reuse in the manufacturing process.

Application

  • DPF (Developer Purification & Filtration System)

DDS-11

Introduction

  • System samples chemicals from the Developer to maintain consistent levels in the concentrations of Alkali, Resist, and Carbonate.

Application

  • DDS-11

Management Category

  • Alkali Concentration : Conductivity measurement
  • Dissolution Resisting Substance : Absorbance measurement
  • Carbonate Concentration : Refractive Index measurement