Introduction

• CDS supplies chemicals that are used in semiconductor & LCD manufacturing processes. Chemicals are transferred to storage tank from Chemical Drum or Tank Lorry, then chemicals will transfer to supply tank to be able to supply to P.O.U by N₂ pressure or pump.

Application

• Chemicals supply for Front-end Process.

Supply Method

• Pumping Supply
• N₂ Pressure Supply

Introduction

• System which blends Chemical and DIW using Batch Method.
• System will blend chemicals using Mixing Tanks before transferring to the Storage tanks or to the Supply tanks.
• Heat Exchangers may apply.

Application

• DSP (Dilute Sulfuric Peroxide) : HF, H₂0₂, H₂SO₄, DIW
• SC-1 (Standard Cleaning) : H₂0₂, NH₄OH, DIW

Supply Method

• Pumping
• N₂ Pressure Supply

Blending Method

• Batch
• In-line

Introduction

• System will blend Developer and DIW using Batch method or the In-line method.
• System will blend chemicals using Mixing Tanks before transferring to the Storage tanks or to the Supply tanks.
• Chemicals free falls through connecting tube connected between the Mixing Tank and Storage Tank, which limits concentration deviations to a minimum.

Supply Method

• Pumping
• N₂ Pressure Supply

Blending Method

• In-Line Mixing Module & Pumping Circulation

Introduction

• System that blends NH₄OH or HF with DIW using the In-line method.
• System will blend chemicals using Mixing Tanks before transferring to the Storage tanks or to the Supply tanks.
• Chemicals free falls through connecting tube connected between the Mixing Tank and Storage Tank, which limits concentration deviations to a minimum.

Blending Method

• In-Line Mixing Module & Pumping Circulation