Clean & Green Hi Technology

Semiconductor

Chemical Dispense System


Introduction

  • CDS supplies chemicals that are used in semiconductor & LCD manufacturing processes. Chemicals are transferred to storage tank from Chemical Drum or Tank Lorry, then chemicals will transfer to supply tank to be able to supply to P.O.U by N₂ pressure or pump.

Application

  • Chemicals supply for Front-end Process.

Supply Method

  • Pumping Supply
  • N₂ Pressure Supply

Chemical Blending System

Introduction

  • System which blends Chemical and DIW using Batch Method.
  • System will blend chemicals using Mixing Tanks before transferring to the Storage tanks or to the Supply tanks.
  • Heat Exchangers may apply.

Application

  • DSP (Dilute Sulfuric Peroxide) : HF, H₂0₂, H₂SO₄, DIW
  • SC-1 (Standard Cleaning) : H₂0₂, H₂SO₄, DIW

Supply Method

  • Pumping
  • N₂ Pressure Supply

Blending Method

  • Batch
  • In-line

Developer Dilution (Nagase OEM)

Introduction

  • System will blend Developer and DIW using Batch method or the In-line method.
  • System will blend chemicals using Mixing Tanks before transferring to the Storage tanks or to the Supply tanks.
  • Chemicals free falls through connecting tube connected between the Mixing Tank and Storage Tank, which limits concentration deviations to a minimum.

Application

  • Developer Dilution

Concentration Spec

  • TMAH    2.380 ± 0.003 wt%

Supply Method

  • Pumping
  • N₂ Pressure Supply

Blending Method

  • In-Line Mixing Module & Pumping Circulation

NH₄OH, HF Dilution

Introduction

  • System that blends NH₄OH or HF with DIW using the In-line method.
  • System will blend chemicals using Mixing Tanks before transferring to the Storage tanks or to the Supply tanks.
  • Chemicals free falls through connecting tube connected between the Mixing Tank and Storage Tank, which limits concentration deviations to a minimum.

Application

  • NH₄OH Dilution
  • HF Dilution

Supply Method

  • Pumping
  • N₂ Pressure Supply

Blending Method

  • In-Line Mixing Module & Pumping Circulation